For Non-Conductive Specimens at Relatively Low Magnification (20x-2kx):
I. Use VP SEM mode (variable pressure) with partial vacuum ~30 Pa
Turn off the infrared camera when the backscatter detector is in use
(Failure to do this will result in a blank white screen when you start the scan).
1) medium accelerating voltage (~15kv)
2) moderately high probe current (~65 and up)
3) medium objective aperture diameter (~2)
4) minimum working distance (5-10mm) for flat specimens or longer (20-30mm)
for greater depth of field
Is your specimen charging? (Look for bright and dark
distortions or apparent movement of the specimen)
II. Remember to adjust aperture & stigmation alignment (at magnification
at least 2kx) after changing above settings. **Tip** Does the image appear
to move when you try to focus at high magnification? This indicates that aperture
and/or stigmation are out of alignment.
III. Remember to focus and stigmate at a magnification (at least) twice that
desired for the image.
IV. Capture the image, transfer to PCI and
save (to the S drive on the network).
V. Please follow the power down procedure carefully:
1) Exit PCI and PCSEM (be sure your files are saved
in PCI, so the captured images in PCSEM can be safely deleted when you quit the
program). 2) Shut down the PC. 3) Remove and store the specimen; leave the specimen
holder in front of the measuring device. 4) Evacuate the chamber; wait for the beep
to indicate it has reached vacuum. 5) Turn the ignition key to the off position.